Dayoo Advanced Ceramic Co.,Ltd
Dayoo Advanced Ceramic Co.,Ltd
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High-Temperature Resistance Ceramic Nozzles for 1200 deg C Process Temperatures in LED Industry
Specially developed for LED manufacturing processes, this product is manufactured using 99.8% high-purity silicon nitride (Si₃N₄) through precision gas pressure sintering. Featuring ultra-high cleanliness, high-temperature resistance, and corrosion resistance to meet stringent MOCVD equipment requirements.
MOCVD equipment: Precise distribution of MO source and NH₃ gas
Epitaxial growth: Uniform gas injection in reaction chambers
Chip fabrication: Protective gas delivery systems
Packaging process: Phosphor spray atomization
Testing equipment: Optical inspection gas control
✓ Ultra-high cleanliness: Metal ion content <1ppm
✓ High-temperature resistance: Withstands 1200°C process temperatures
✓ Zero gas contamination: No particulate emission
✓ Precise flow control: ±1% flow accuracy
✓ Extended lifespan: Endures 5000+ thermal cycles
| Parameter | Specification | Test Standard |
|---|---|---|
| Material Purity | Si₃N₄≥99.8% | GDMS |
| Particle Emission | ≤5 particles/ft³(≥0.1μm) | SEMI F24 |
| Surface Roughness | Ra≤0.05μm | ISO 4287 |
| Thermal Deformation | ≤0.01mm@1000℃ | ASTM E228 |
| Bore Tolerance | ±0.005mm | VDI/VDE 2617 |
| Gas Adsorption | ≤0.01% | DIN 1343 |
Material preparation:
Nano powder (D50≤0.3μm)
Dust-free ball milling (Class 10 cleanroom)
Forming and sintering:
Isostatic pressing (200MPa)
Ultra-clean sintering (Class 100 environment)
Post-processing:
Plasma cleaning (surface decontamination)
Ultrasonic DI water cleaning
Packaging:
Double vacuum packaging
ISO Class 4 clean bags
⚠️ Installation: Class 100 cleanroom operation required
⚠️ Gas control: Use 99.999% high-purity gases
⚠️ Temperature management: Heating rate ≤5℃/min
⚠️ Maintenance: Helium leak test every 500 hours
Extended warranty: 18 months
Cleanliness testing: Free particle emission test
Rapid response: 12-hour technical support
Process optimization: Gas flow field simulation
Q: How to ensure MO source delivery purity?
A: Triple safeguards:
① Surface Si passivation
② Class 100 clean packaging
③ Pre-installation plasma cleaning
Q: Handling nozzle clogging?
A: Recommended:
• 200W ultrasonic + DI water cleaning
• No mechanical rod cleaning
• Professional cleaning service available
Q: Compatibility with different epitaxial layers?
A: Customizable options:
Multi-hole array structures
Gradual bore size designs
Special angle configurations